대면적 고해상도 3차원주사전자현미경 (Large-area, high-resolution three-dimensional scanning electron microscope) 연구시설·장비 관리항목 시설장비등록번호 NFEC-2022-04-278792 모델명 Apero 2S Lovac 제작사 ThermoFisher scientific <style type="text/css"> <!-- p.0 { line-height:160%; margin-left:0pt; margin-right:0pt; text-indent:0pt; margin-top:0pt; margin-bottom:0pt; text-align:justify; word-break:break-hangul; layout-grid-mode:both; vertical-align:baseline; text-autospace:none; letter-spacing:0pt; font-size:10.0pt; color:#000000; } --> </style> <p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><center><span style="mso-fareast-font-family:나눔스퀘어; font-family:나눔스퀘어; font-size:14.0pt; font-weight:bold; ">대면적 고해상도 </span><span style="mso-fareast-font-family:나눔스퀘어; mso-ascii-font-family:나눔스퀘어; mso-font-width:100%; letter-spacing:0pt; mso-text-raise:0pt; font-family:나눔스퀘어; font-size:14.0pt; font-weight:bold; ">3</span><span style="font-family:나눔스퀘어; font-size:14.0pt; font-weight:bold; ">차원주사전자현미경</span></p> <p class="0" style="mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><center><span style="font-family:나눔스퀘어; font-size:14.0pt; font-weight:bold; ">(Large-area, high-resolution three-dimensional scanning electron microscope)</span></p> <p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"> <!--[if gte vml 1]><v:shapetype id="_x0000_t75" coordsize="21600,21600" o:spt="75" o:preferrelative="t" path="m@4@5l@4@11@9@11@9@5xe" filled="f" stroked="f"> <v:stroke joinstyle="miter"></v:stroke> <v:formulas> <v:f eqn="if lineDrawn pixelLineWidth 0"></v:f> <v:f eqn="sum @0 1 0"></v:f> <v:f eqn="sum 0 0 @1"></v:f> <v:f eqn="prod @2 1 2"></v:f> <v:f eqn="prod @3 21600 pixelWidth"></v:f> <v:f eqn="prod @3 21600 pixelHeight"></v:f> <v:f eqn="sum @0 0 1"></v:f> <v:f eqn="prod @6 1 2"></v:f> <v:f eqn="prod @7 21600 pixelWidth"></v:f> <v:f eqn="sum @8 21600 0"></v:f> <v:f eqn="prod @7 21600 pixelHeight"></v:f> <v:f eqn="sum @10 21600 0"></v:f> </v:formulas> <v:path o:extrusionok="f" gradientshapeok="t" o:connecttype="rect"></v:path> <o:lock v:ext="edit" aspectratio="t"></o:lock> </v:shapetype><v:shape id="_x437227272" style="v-text-anchor:top;mso-position-vertical-relative:line;mso-position-vertical:absolute;margin-top:14.62pt;mso-position-horizontal-relative:text;mso-position-horizontal:absolute;width:144.70pt;height:198.30pt;position:absolute;" type="#_x0000_t75"><v:imagedata o:title="EMB000037800871" src="file:///C:\Users\정보전~1\AppData\Local\Temp\Hnc\BinData\EMB000037800871.bmp"></v:imagedata><w:wrap type="topAndBottom"></w:wrap></v:shape><![endif]--> <![if !vml]> <center><img src="/sites/ntscenter/images/20220504_03.bmp" alt="" border="0" width="250px" /></center> </p> <p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"> <![if !supportEmptyParas]> <![endif]> </p> <p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="mso-fareast-font-family:나눔스퀘어; font-family:나눔스퀘어; font-size:12.0pt; font-weight:bold; ">연구시설</span><span style="mso-fareast-font-family:나눔스퀘어; mso-ascii-font-family:나눔스퀘어; mso-font-width:100%; letter-spacing:0pt; mso-text-raise:0pt; font-family:나눔스퀘어; font-size:12.0pt; font-weight:bold; ">·</span><span style="font-family:나눔스퀘어; font-size:12.0pt; font-weight:bold; ">장비 관리항목</span></p> <table style="border-collapse:collapse;table-layout:fixed;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;mso-table-overlap:never;"> <tr> <td style="width:98.98pt;height:18.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><p class="0" style="text-align:center;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="mso-fareast-font-family:나눔스퀘어; font-family:나눔스퀘어; font-weight:bold; ">시설장비등록번호</span></p></td> <td style="width:133.78pt;height:18.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"> <![if !supportEmptyParas]> NFEC-2022-04-278792 <![endif]> </p></td> </tr> <tr> <td style="width:98.98pt;height:18.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><p class="0" style="text-align:center;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="font-family:나눔스퀘어; font-weight:bold; ">모델명</span></p></td> <td style="width:133.78pt;height:18.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="mso-fareast-font-family:나눔스퀘어; mso-ascii-font-family:나눔스퀘어; mso-font-width:100%; letter-spacing:0pt; mso-text-raise:0pt; font-family:나눔스퀘어; ">Apero 2S Lovac</span></p></td> </tr> <tr> <td style="width:98.98pt;height:18.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><p class="0" style="text-align:center;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="font-family:나눔스퀘어; font-weight:bold; ">제작사</span></p></td> <td style="width:133.78pt;height:18.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="font-family:나눔스퀘어; ">ThermoFisher scientific</span></p></td> </tr> </table> <p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"> </p> 연구시설·장비 소개 장비설명 Shottky 전계 방출 주사 전자 현미경 (FESEM)으로 초고해상도의 이미지 관찰 광범위한 시료 이미징 가능 신속하고 쉬운 시료 로딩 토포그래피 (topography) 및 표면 정보를 모두 동시에 탐색 Thermo Scientific Maps 소프트웨어로 4개의 다른 동시 신호를 사용하여 대면적 수집을 자동화 구성 및 성능 표준검출기 : T1, T2, T3, IR-CCD, Nav-Cam+ 옵션 검출기 : DBS, LVD, DBS-GAD, STEM 3+ 등 스테이지 : 5-축 전동식 유센트릭 스테이지, 110 x 110 ㎜2(경사 범위는 105°) 기울이지 않은 위치에서 5kg (최대 시료 중량) 최대 빔 전류 : 50nA (400nA 구성도 사용 가능) 표준 시료 홀더 : 다목적 홀더, 스테이지에 직접 장착하며, 최대 18개의 표준 스터브(Ø12㎜), 3개의 사전 틸트된 스터브, 절단 시료, 2개의 사전 틸트된 로우-바(row-bar) 홀더(38° 및 90°)를 호스트할 수 있으며, 시료 장착을 위한 도구가 필요 없음 챔버 : 340㎜ 내부 폭, 12개의 포트, 3개의 동시 EDS 검출기 가능, 180°에서 2개, 스테이지의 경사 축과 직각을 이루는 동평면 EDS/EBSD <style type="text/css"> <!-- p.0 { line-height:160%; margin-left:0pt; margin-right:0pt; text-indent:0pt; margin-top:0pt; margin-bottom:0pt; text-align:justify; word-break:break-hangul; layout-grid-mode:both; vertical-align:baseline; text-autospace:none; letter-spacing:0pt; font-size:10.0pt; color:#000000; } --> </style> <p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"> <![if !supportEmptyParas]> <![endif]> </p> <p class="0" style="text-align:left;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="mso-fareast-font-family:나눔스퀘어; font-family:나눔스퀘어; font-size:12.0pt; font-weight:bold; ">연구시설</span><span style="mso-fareast-font-family:나눔스퀘어; mso-ascii-font-family:나눔스퀘어; mso-font-width:100%; letter-spacing:0pt; mso-text-raise:0pt; font-family:나눔스퀘어; font-size:12.0pt; font-weight:bold; ">·</span><span style="font-family:나눔스퀘어; font-size:12.0pt; font-weight:bold; ">장비 소개</span></p> <table style="border-collapse:collapse;table-layout:fixed;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;mso-table-overlap:never;"> <tr> <td style="width:79.59pt;height:98.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><p class="0" style="text-align:center;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="mso-fareast-font-family:나눔스퀘어; font-family:나눔스퀘어; font-weight:bold; ">장비설명</span></p></td> <td style="width:396.55pt;height:98.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><ul> <li><span style="mso-fareast-font-family:나눔스퀘어; mso-ascii-font-family:나눔스퀘어; mso-font-width:100%; letter-spacing:0pt; mso-text-raise:0pt; font-family:나눔스퀘어; ">Shottky </span><span style="mso-fareast-font-family:나눔스퀘어; font-family:나눔스퀘어; ">전계 방출 주사 전자 현미경 </span><span style="font-family:나눔스퀘어; ">(FESEM)</span><span style="font-family:나눔스퀘어; ">으로 초고해상도의 이미지 관찰</span></li> <li><span style="font-family:나눔스퀘어; ">광범위한 시료 이미징 가능</span></li> <li><span style="font-family:나눔스퀘어; ">신속하고 쉬운 시료 로딩</span></li> <li><span style="font-family:나눔스퀘어; ">토포그래피 </span><span style="font-family:나눔스퀘어; ">(topography) </span><span style="font-family:나눔스퀘어; ">및 표면 정보를 모두 동시에 탐색</span></li> <li><span style="font-family:나눔스퀘어; ">Thermo Scientific Maps </span><span style="font-family:나눔스퀘어; ">소프트웨어로 </span><span style="font-family:나눔스퀘어; ">4</span><span style="font-family:나눔스퀘어; ">개의 다른 동시 신호를 사용하여 대면적 수집을 자동화</span></li> </ul></td> </tr> <tr> <td style="width:79.59pt;height:178.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><p class="0" style="text-align:center;word-break:keep-all;mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="font-family:나눔스퀘어; font-weight:bold; ">구성 및 성능</span></p></td> <td style="width:396.55pt;height:178.48pt;padding:1.41pt 5.10pt 1.41pt 5.10pt;border-top:solid #000000 0.28pt;border-left:solid #000000 0.28pt;border-bottom:solid #000000 0.28pt;border-right:solid #000000 0.28pt;" valign="middle"><ul> <li><span style="font-family:나눔스퀘어; ">표준검출기 </span><span style="font-family:나눔스퀘어; ">: T1, T2, T3, IR-CCD, Nav-Cam+</span></li> <li><span style="font-family:나눔스퀘어; ">옵션 검출기 </span><span style="font-family:나눔스퀘어; ">: DBS, LVD, DBS-GAD, STEM 3+ </span><span style="font-family:나눔스퀘어; ">등</span></li> <li><span style="font-family:나눔스퀘어; ">스테이지 </span><span style="font-family:나눔스퀘어; ">: 5-</span><span style="font-family:나눔스퀘어; ">축 전동식 유센트릭 스테이지</span><span style="font-family:나눔스퀘어; ">, 110 x 110 </span><span style="mso-fareast-font-family:나눔스퀘어; mso-hansi-font-family:나눔스퀘어; mso-font-width:100%; letter-spacing:0pt; mso-text-raise:0pt; font-family:나눔스퀘어; ">㎜</span><span style="mso-fareast-font-family:나눔스퀘어; mso-ascii-font-family:나눔스퀘어; mso-font-width:100%; letter-spacing:0pt; mso-text-raise:0pt; vertical-align:super; font-family:나눔스퀘어; ">2</span><span style="font-family:나눔스퀘어; ">(</span><span style="font-family:나눔스퀘어; ">경사 범위는 </span><span style="font-family:나눔스퀘어; ">105°)</span></li> </ul> <p class="0" style="mso-pagination:none;text-autospace:none;mso-padding-alt:0pt 0pt 0pt 0pt;"><span style="mso-fareast-font-family:나눔스퀘어; "> </span><span style="font-family:나눔스퀘어; ">기울이지 않은 위치에서 </span><span style="font-family:나눔스퀘어; ">5kg (</span><span style="font-family:나눔스퀘어; ">최대 시료 중량</span><span style="font-family:나눔스퀘어; ">)</span></p> <ul> <li><span style="font-family:나눔스퀘어; ">최대 빔 전류 </span><span style="font-family:나눔스퀘어; ">: 50nA (400nA </span><span style="font-family:나눔스퀘어; ">구성도 사용 가능</span><span style="font-family:나눔스퀘어; ">)</span></li> <li><span style="font-family:나눔스퀘어; ">표준 시료 홀더 </span><span style="font-family:나눔스퀘어; ">: </span><span style="font-family:나눔스퀘어; ">다목적 홀더</span><span style="font-family:나눔스퀘어; ">, </span><span style="font-family:나눔스퀘어; ">스테이지에 직접 장착하며</span><span style="font-family:나눔스퀘어; ">, </span><span style="font-family:나눔스퀘어; ">최대 </span><span style="font-family:나눔스퀘어; ">18</span><span style="font-family:나눔스퀘어; ">개의 표준 스터브</span><span style="font-family:나눔스퀘어; ">(Ø12</span><span style="font-family:나눔스퀘어; ">㎜</span><span style="font-family:나눔스퀘어; ">), 3</span><span style="font-family:나눔스퀘어; ">개의 사전 틸트된 스터브</span><span style="font-family:나눔스퀘어; ">, </span><span style="font-family:나눔스퀘어; ">절단 시료</span><span style="font-family:나눔스퀘어; ">, 2</span><span style="font-family:나눔스퀘어; ">개의 사전 틸트된 로우</span><span style="font-family:나눔스퀘어; ">-</span><span style="font-family:나눔스퀘어; ">바</span><span style="font-family:나눔스퀘어; ">(row-bar) </span><span style="font-family:나눔스퀘어; ">홀더</span><span style="font-family:나눔스퀘어; ">(38° </span><span style="font-family:나눔스퀘어; ">및 </span><span style="font-family:나눔스퀘어; ">90°)</span><span style="font-family:나눔스퀘어; ">를 호스트할 수 있으며</span><span style="font-family:나눔스퀘어; ">, </span><span style="font-family:나눔스퀘어; ">시료 장착을 위한 도구가 필요 없음</span></li> <li><span style="font-family:나눔스퀘어; ">챔버 </span><span style="font-family:나눔스퀘어; ">: 340</span><span style="font-family:나눔스퀘어; ">㎜ </span><span style="font-family:나눔스퀘어; ">내부 폭</span><span style="font-family:나눔스퀘어; ">, 12</span><span style="font-family:나눔스퀘어; ">개의 포트</span><span style="font-family:나눔스퀘어; ">, 3</span><span style="font-family:나눔스퀘어; ">개의 동시 </span><span style="font-family:나눔스퀘어; ">EDS </span><span style="font-family:나눔스퀘어; ">검출기 가능</span><span style="font-family:나눔스퀘어; ">, 180°</span><span style="font-family:나눔스퀘어; ">에서 </span><span style="font-family:나눔스퀘어; ">2</span><span style="font-family:나눔스퀘어; ">개</span><span style="font-family:나눔스퀘어; ">, </span><span style="font-family:나눔스퀘어; ">스테이지의 경사 축과 직각을 이루는 동평면 </span><span style="font-family:나눔스퀘어; ">EDS/EBSD</span></li> </ul></td> </tr> </table>